Dr. Yifeng Shao
Postdoctoral Researcher on EUV Wafer Metrology
2019 – 2024, Delft University of Technology & Utrecht University
Postdoctoral Researcher on Aberrations Retrieval for SEM
2018 – 2019, Delft University of Technology & ASML
PhD: Inverse Problems on Imaging and Imaging Systems
2014 – 2021, Delft University of Technology
Patents
- Shao, Y. and Goosen, M. R. (2020). Method of determining aberrations in images obtained by a charged particle beam tool, method of determining a setting of a charged particle tool, and charged particle tool (WO2021078445A1, CN114631164A, TWI792070B, US20220328282A1)
Publications
- Senhorst, S., Shao, Y., Weerdenburg, S., et al. Mitigating tilt-induced artifacts in reflection ptychography via optimization of the tilt angles. Optics Express 32, 44017 (2024)
- Shao, Y., Weerdenburg, S., Seifert, J., et al. Wavelength-multiplexed multi-mode EUV reflection ptychography based on automatic differentiation. Light Science & Applications 13, 196 (2024) – Cover Article
- Seifert, J., Shao, Y., Mosk, A. P. Noise-robust latent vector reconstruction in ptychography using deep generative models. Optics Express 32, 1020 (2023)
- Seifert, J., Shao, Y., Van Dam, R., et al. Maximum-likelihood estimation in ptychography in the presence of Poisson–Gaussian noise statistics. Optics Letters 48, 6027 (2023)
- Shao, Y., Urbach, H.P. Comment on “Efficient full-path optical calculation of scalar and vector diffraction using the Bluestein method”. Light Sci Appl 10, 12 (2021)
Presentations
- Aug 2023 – Light Conference Week 2023:
EUV reflection ptychography with high-harmonic generation source for mask and wafer metrology - May 2023 – Fraunhofer IISB Lithography Simulation Workshop:
Multiple spectral harmonics and spatial modes EUV ptychography reconstruction with automatic-differentiation - May 2023 – Workshop on Quantification of Uncertainties in Nano Optical Metrology:
EUV diffractive imaging with high-harmonic generation source for wafer sample characterization - Nov 2022 – MATHMET 2022 by European Metrology Network (EMN) for Mathematics and Statistics:
Solving inverse scattering problem efficiently using Lorentz reciprocity theorem - Nov 2022 – School of Physics workshop organized by SPIE student chapter:
- New paradigm for solving inverse problems
- Hands-on programming session with applications of automatic differentiation using TensorFlow
- Sep 2022 – Optics Netherlands Summerschool:
- Design of Broadband Illumination Optics in the EUV wavelength range
- New paradigm for solving inverse problems: Combining physics knowledge with AI through automatic-differentiation